摘要
A spectroscopic method to determine thickness on chromatic polarization interferometry. With of quartz wave plate is presented. The method is based the polarization-resolved transmission spectrum （PRTS） curve, the phase retardation of quartz wave plate can be determined at a wide spectral range from 200 to 2000 nm obviously. Through accurate judgment of extreme points of PRTS curve at long-wave band, the physical thickness of quartz wave plates can be obtained exactly. We give a measuring example and the error analysis. It is found that the measuring precision of thickness is mainly determined by the spectral resolution of spectrometer.
A spectroscopic method to determine thickness on chromatic polarization interferometry. With of quartz wave plate is presented. The method is based the polarization-resolved transmission spectrum （PRTS） curve, the phase retardation of quartz wave plate can be determined at a wide spectral range from 200 to 2000 nm obviously. Through accurate judgment of extreme points of PRTS curve at long-wave band, the physical thickness of quartz wave plates can be obtained exactly. We give a measuring example and the error analysis. It is found that the measuring precision of thickness is mainly determined by the spectral resolution of spectrometer.
基金
This work was supported by the National Ba sic Research Program of China (973 Program) under Grant No. 2006CB806000.
