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体硅高压LDMOS器件电学特性温度效应的研究

Research on Temperature Effect of the Electrical Parameters of the Bulk-Silicon High-voltage LDMOSFET
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摘要 从等温和非等温两个角度,在250 K^573 K(-23℃~300℃)范围内,对体硅高压LDMOS的主要电学参数随温度的变化进行了研究。系统地研究了体硅高压LDMOS阈值电压、导通电阻和饱和电流等主要电学参数的温度效应及其机理。 In this paper,the research of the temperature effect on the key LDMOS electrical parameters over the temperature rage of 250 K - 573 K is presented, by using both isothermal and non - isothermal methods. The temperature effect and the mechanism of LDMOS Vth,on- state resistance and saturation current, are reported systematically.
作者 刘侠 王钦
出处 《现代电子技术》 2006年第23期124-126,共3页 Modern Electronics Technique
关键词 体硅LDMOS 等温 非等温 负阻效应 bulk - silicon LDMOS isothermah non - isothermal negative resistance effect
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参考文献8

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