摘要
在对半导体硅片制造生产线进行建模和仿真的过程中,提出了非动态加工区和动态加工区的分类思想,给出了各自基于Simul8的实现方法。对于高度复杂的动态加工区,给出了3种解决方法,从仿真速度上比较其优劣。仿真应用表明,提出的半导体生产线分类方法有效改进了仿真的性能,使仿真指导生产具有可行性。
During the process of modeling and simulating the wafer production line, a classification of static and dynamic process region is presented and implemented based on Simul8 software. For the high complicated dynamic process region, three ways of solution are presented, and their advantages and disadvantages are compared. The simulation results show that this key technique of dealing with the semiconductor production line can improve the performance of simulation, and make production guided by simulation possible.
出处
《计算机工程》
EI
CAS
CSCD
北大核心
2006年第19期248-250,共3页
Computer Engineering
基金
国家"973"计划基金资助项目(2002CB312202)
国家自然科学基金资助项目(60374005)
关键词
建模仿真
动态加工区
二级缓冲区
存储空间
Modeling and simulation
Dynamic process region
Secondary buffer
Buffer space
