摘要
设计了一种半导体激光自混频干涉法测量表面粗糙度的实验,对半导体激光自混频干涉法测量表面粗糙度中的干涉效应进行了理论分析,推导了干涉信号与表面粗糙度的数学关系式,讨论了影响测量信号的因素。实验结果表明,随着加工表面粗糙度的降低,反射光的强度逐渐增加,被测物体表面的反射率越高,越有利于测量。
This paper introduced experimentation on measurement of roughness degree of work piece surface with the self-mixing interference in a diode laser, analyzed theoretically about the self-mixing interference effect and deduced a mathematics expression of the theories model for an interference signal. It also discussed some factors that influencing measurement signal. Results show that with decrease of roughness of object, it gets higher reflectivity and this makes measurement easier.
出处
《中国测试技术》
CAS
2006年第5期45-46,135,共3页
CHINA MEASUREMENT & TESTING TECHNOLOGY
关键词
干涉效应
半导体激光
自混频干涉
粗糙度
测量
反射率
Interference effect
Diode-laser
Self-mixing interference
Surface roughness
Measure
Reflecfivity
