摘要
采用“精密机械—显微镜—ＣＣＤ—图象处理—光栅测量—计算机控制”的总体测量方案，用图象处理方法实现了光学非接触对准，用光栅系统测量轴向距离，成功地解决了双栅网间距的测量难题。本文介绍该方法的测量原理及对该测量方案所做的实验，实验结果表明：重复测量精度＜±３μｍ。
For sloving the difficult measurement problem of the interval between two grids, an equipment composed of precision machine, microscope, CCD camera, image processing, grating measurement and computer control system is used. The optical non-contact alignment is achieved by image processing and the interval is measured by the grating measurement system. In this paper, the measurement principle is introduced and experiments done on this system are given. Experimental results show that the repeatability of measurement (3σ) is less than ±3μm.
出处
《计量学报》
CSCD
1996年第4期261-265,共5页
Acta Metrologica Sinica
