摘要
给出了针对超精表面纳米形貌检测需要而研制的一种实用型宽范围扫描隧道显微镜(STM),扫描范围为40×40×10μm^3,配有一个放大倍数可调的光学显微镜帮助选择视场,可测量较大尺寸试件。实验表明,该STM所测图像清晰、使用方便、结构简单,适于产品化。
-A long—range scanning tunneling microscope (STM) which works well in measuring ultraprecision surface with nanometer scale resolution is developed. The maximum scanning range is 40×40×10μm^3. There is an optical microscope attached to the STM for exact selection of measuring area. The STM is proved to be convenient in use and commercially availabel by experiment.
出处
《计量学报》
CSCD
1996年第3期226-228,共3页
Acta Metrologica Sinica
基金
国家自然科学基金
关键词
扫描隧道显微镜
超精密测量
纳米技术
显微镜
Scanning tunneling microscope
Ultraprecision measurement
Nanotechnology
Long—range scanning
