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15MHz分子污染监测仪的研制 被引量:2

DEVELOPMENT OF 15MHz MOLECULAR CONTAMINATION MONITOR SENSOR
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摘要 石英晶体微量天平测试技术可用于监测非金属材料出气和航天器敏感系统表面的分子污染沉积。在地面分子污染监测设备研制的基础上,针对空间应用,设计研制了15MHz温控分子污染监测仪。它具有质量轻、体积小、功耗低的特点。通过一系列测试和地面试验,表明它的监测灵敏度可达2.94×10-9g1cm2,在-40~30℃范围内对探头的控温精度优于0.18℃,并可通过计算机控制其工作温度点,实时数据采集系统具有1次1s的采集、处理功能和良好的软件操作界面。 Quartz crystal microbalance test technique is widely used in monitoring non-metal material outgassing and molecular contamination condensation on sensitive system surfaces of spacecraft. Based on molecular contamination monitor development and orient to space applieation, the 15MHz temperature controlled molecular contamination monitor sensor was designed and developed which have the character of light, small and low power consumption. Tests and ground simulation experiments indicated that it' s monitor sensitivity is 2.94×10^-9 g/cm^2, temperature control precision of the testing cell excelled 0.18 ℃ in the range of -40-30 ℃. Furthermore, the temperature of testing cell can be controled by computer. With favorable software operation interface, the real-time data collection system collects and processes data in every 1 second.
出处 《真空与低温》 2006年第3期145-148,161,共5页 Vacuum and Cryogenics
基金 真空低温技术与物理国家级重点实验室基金(5147504040HT6001)
关键词 石英晶体微量天平 分子污染 温控 数据采集 Quartz crystal microbalance molecular contamination temperature control data collection
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