摘要
用光学多道分析仪研究表面波型常压微波感耦氖等离子体（Ｎｅ－ＭＩＰ）。采用“多线法”测定了Ｎｅ－ＭＩＰ的激发温度；研究了实验参数对激发温度的影响；讨论了该等离子体的激发生成机制；推算了亚稳态原子浓度随实验参数的变化情况。
In this paper,the Neon Microwave-induced Plasma (Ne-MIP)Sustained by a surfatron has been studied with Maxwell's method using an OMA equipment.The Ne-MIP was obtained in atmosphere pressure; the influence of experimental parameters on Excitation Temperature,such as, microwave power, flux of Neon gas and view possition has been considered;the excitation mechanism of this kind of plasma has been discussed; according to this mechanism, the atomic conentraion of Neon metastable under different experimental conditions has been calculated.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1996年第6期46-50,共5页
Spectroscopy and Spectral Analysis
关键词
激发温度
激发机制
氖亚稳态
氖等离子体
Ne-MIP, Excitation temperature, Excitation mechanism, Ne metastable.
