摘要
通过直流二极溅射法制备了具有不同调制波长和周期的Al／Pb金属多层膜。分别通过扫描电镜、X-射线衍射试验以及能谱对多层膜的表面形貌、断面形貌、结构和组成进行了分析。结果表明,所制备的Al／Pb纳米多层膜既无新相生成也无非晶相产生;在亚微米尺寸范围内,铝和铅的微粒分布均匀;在纳米尺寸范围内,形成了Pb对Al的包覆。
The Al/Pb metallic multilayer of different modulation wave and periods was prepared by direct current sputtering. The surface morphology, section morphology, structure and composition of multilayer were analyzed by scanning electron microscope, X-ray diffraction test and energy spectrum test. Results show that neither new phase nor amorphous phase exists in the coating of Al/Pb nanometallic multilayer. The particles of Pb and Al were homogeneously mixed in submicrometer range, and Al was contained in particles in the nanometer range.
出处
《电镀与涂饰》
CAS
CSCD
2006年第9期20-22,共3页
Electroplating & Finishing
基金
国家自然科学基金资助项目(50061002)。
关键词
直流溅射
Al/Pb纳米金属多层膜
微粒分布
纳米尺寸
direct current sputtering
Al/Pb nanpmetallic multilayer
particle distribution
nanometer range
