摘要
介绍了雷尼绍激光干涉仪和多普勒激光干涉仪的测量原理,并对这两种激光干涉仪的测量方法进行了比较。结果表明,当只需要测量机床的线性定位精度时,两者都比较适合。当需要测量机床的所有几何误差时,由于多普勒激光干涉仪采用了激光向量技术,测量周期大大缩短,测量效率较高。
The measurement principle of Renishaw laser interferometer and Doppler laser interferometer were introduced. The two measurement methods was compared, It shows that the measurement methods are adapted when the linear positional errors only are measured. Because Doppler laser interferometer adopts the laser vector measurement technique, its measurement time was decreased and efficiency is high when all errors must be measured.
出处
《机电工程》
CAS
2006年第9期53-54,57,共3页
Journal of Mechanical & Electrical Engineering
关键词
数控机床
误差检测
激光干涉仪
CNC machine tools
errors measurement
laser interferometer
