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Micro-structure of PECVD Diamond Films by Slow Positron Beam

Micro-structure of PECVD Diamond Films by Slow Positron Beam
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摘要 The microstructure of diamond films was studied by slow positron beam and Raman spectroscopy. For the Raman spectroscopy experiment on diamond films, a high fraction of the sp3 hybridized bond was detected in samples. Positron annihilation spectra analysis further illuminated that the concentration and types of defects were different in each sample. S-E curves of all samples showed that diamond crystal structures had obvious variation in each sample. These results indicated that positron annihilation spectroscopy was an effective means to measure microstructure of diamond films.
出处 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 北大核心 2006年第4期291-293,共3页 化学物理学报(英文)
基金 V. ACKN0WLEDGMENT This work was supported by the National Natural Science Foundation of China (No.10425072) and the National High Technology Research and Development Program of China (2003AA84ts18).
关键词 Diamond film DEFECT Slow positron DIFFUSION 金刚石膜 缺陷 慢正电子 扩散长度
分类号 O [理学]
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参考文献10

  • 1S.Dannefear and W.Zhu,Phys.Rev.B 53,1979 (1996). 被引量:1
  • 2J.Rosa,J.Pangrác,M.Nesladek,et al.Diamond Relat.Mater.7,1048 (1998). 被引量:1
  • 3M.Harting,M.Hempel and D.T.Britton,Appl.Surf.Sci.149,170 (1999). 被引量:1
  • 4W.Z.Yu,Positron Physics and Application,Beijing:Science Press,(2003). 被引量:1
  • 5X.D.Zhu,H.Y.Zhou,R.J.Zhan,et al.Appl.Surf.Sci.136,345 (1998). 被引量:1
  • 6H.M.Weng,X.Y.Zhou,B.J.Ye,et al.Physics 5,308 (2000). 被引量:1
  • 7A.Van Veen,et al.AIP Conf.Proc.218,171 (1990). 被引量:1
  • 8E.H.Lee,D.R.Hembree,Jr.G.R.Rao and L.K.Mansur,Phys.Rev.B 48,15540 (1993). 被引量:1
  • 9I.Y.Al-Qaradawi,P.A.Sellin and P.G.Coleman,Appl.Surf.Sci.194,29 (2002). 被引量:1
  • 10A.Uedono,S.Fujii and N.Morishita,J.Phys.Condens.Matter.11,4109 (1999). 被引量:1

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