摘要
飞秒激光由于其超快时间特性和超高峰值功率特性在精密微纳加工领域引起了人们广泛的重视.在与物质的相互作用中它能快速、准确地将能量作用在特定的区域内,从而可以获得极高的分辨率和加工精度.文章综述了飞秒激光精密微纳加工的最新研究进展,分别就飞秒激光烧蚀微加工和飞秒激光双光子聚合产生三维微纳结构进行了介绍,阐述了各自的物理机制.最后对飞秒激光微纳加工的研究前景做了初步探讨.
Great interest is focused on femtosecond laser micro - nano fabrication due to the ultra - short time scale and ultra - high peak power density characteristics of the femtosecond lasers. Very high resolution and accuracy can be achieved when working with rigid materials and liquid resin. In this paper We introduce the progress of femtosecond laser precise micro - nano fabrication. Two different fabrication mechanisms are described including laser ablation and two photopolymerization. Finally, the prospect of femtosecond laser fabrication is discussed.
出处
《物理》
CAS
北大核心
2006年第8期679-683,共5页
Physics
基金
国家自然科学基金(批准号:60490280
60225005
1022401)
中国科学院知识创新工程(批准号:KJXC-SW-W14)资助项目
关键词
飞秒激光
微纳加工
烧蚀
双光子聚合
femtosecond laser, micro-nano fabrication, ablation, two photopolymerization
