摘要
评述了采用电调整微蚀刻试验表明,它适用于各种各样的线宽和间距的精细导线的制造。比起常规喷射蚀刻工艺来,其侧蚀小、蚀刻因子和tanθ高的效果。
This paper describes the use of electrically mediated microetching on the test samples with a variety of copper line widths and spacing has proven effective.The undercut,etch factor and tanO values were better than standard spray etching process.
出处
《印制电路信息》
2006年第8期34-35,59,共3页
Printed Circuit Information
