摘要
利用电子束致二次电子发生装置,选择具有不同组成、相同尺寸(φ25mm×0.3mm)的Al2O3陶瓷样品进行表面二次电子发射系数的测量,在相同实验条件下获得了典型的表面二次电子发射特性曲线。同时,就测试过程中的实验现象以及组成对Al2O3陶瓷二次电子发射特性的影响进行了简要分析和讨论。结果表明:组成不同的Al2O3陶瓷样品具有明显不同的二次电子发射特性,适当的体掺杂有利于降低Al2O3陶瓷二次电子发射系数和改善表面性能。此外,由于测试过程中试验参数的变化对测量结果具有明显影响,为了保证测量结果的一致性和可比性,应采用相同的试验方案并尽可能确保各试验参数的稳定性。
Using electron-beam equipment, the induced secondary electron emission （SEE） coefficient of alumina ceramic samples with different compositions and identical dimensions （Ф25mm×0.3mm）were measured. Typical characteristic curves of surface SEE were obtained under the same experimental conditions. Effects of the composition on SEE performance of alumina ceramics were briefly analyzed and discussed. Results show that alumina ceramic samples with different compositions possess obvious different SEE properties, and proper bulk doping is helpful to SEE coefficient reduction and surface performance modification of alumina ceramics. In addition, when measuring SEE coefficient, an identical test procedure should be adopt and all experimental conditions should be maintained stable to ensure the refiability and comparability of measured results, as most of the experimental conditions were found to influence the testing results apparently.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2006年第6期713-716,共4页
Journal of The Chinese Ceramic Society
基金
中国工程物理研究院电子工程研究所创新基金(S20041310)资助项目
关键词
氧化铝陶瓷
二次电子发射
表面电荷累积
发射系数
alumina ceramics
secondary electron emission
surface charge accumulation
emission coefficient
