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Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field 被引量:1

Simulation of Heat Transfer and Oxygen Transport in a Czochralski Silicon System with and Without a Cusp Magnetic Field
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摘要 Simulations of heat transfer and oxygen transport during a Czochralski growth of silicon with and without a cusp magnetic field were carried out. A finite volume method with a low-Reynolds number K-e model proposed by Jones-Launder was employed. The numerical results were compared with the experimental data in the literature. It is found that the calculated results are in good agreement with the experimental data. Simulations of heat transfer and oxygen transport during a Czochralski growth of silicon with and without a cusp magnetic field were carried out. A finite volume method with a low-Reynolds number K-ε model proposed by Jones-Launder was employed. The numerical results were compared with the experimental data in the literature. It is found that the calculated results are in good agreement with the experimental data.
出处 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2006年第1期8-14,共7页 中国化学工程学报(英文版)
基金 Supported by the Ph.D. Start-up Fund of Beijing University of Technology (No.127-00227).
关键词 CZOCHRALSKI magnetic field turbulent model SILICON CUSP磁场 提拉法 晶体生长 单晶硅 传热 氧运输 数值模拟
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