摘要
利用自行研制的高精度变间隙不接触三电极系统,研究了在薄膜材料(厚度小于30μm)相对电容率(rε)和介质损耗角正切(tanδ)测量中的相关技术问题,包括试样厚度测量的准确度,薄膜多层总厚度的合理选择,试样与电极间预留空气间隙的大小等.此外,还对两种不接触电极方法(变间隙法和变电容法)作了比较,分析了各自的优缺点及适用范围.研究结果表明,空气介质的变间隙不接触电极方法可成功应用于板材和薄膜试样rε和tanδ的测量,rε的测量值误差可控制在5%以内,tanδ可测到10-5数量级.
High precision air-medium space-adjustable non-contact 3 electrode system is designed to investigate the technical matters in εr and tanδ measurement of films thinner than 30 μm, including the measurement accuracy of sample thickness, the choice of whole thickness of film multilayers, the air space remained between the sample and electrode. Simultaneously, two non-con tact methods are compared to analyze the individual applicability. The results indicate that the air-medium space-adjustable non contact 3-electrode method can be applied to plate samples and thin films with measuring error of εr less than 5 % and the order of tanδ up to 10^-5.
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
2006年第6期704-708,共5页
Journal of Xi'an Jiaotong University
基金
电力设备电气绝缘国家重点实验室中青年基础研究创新基金资助项目
关键词
空气介质
变间隙
不接触三电极
介电参数
薄膜
air-medium
adjustable space
non-contact 3-electrode
dielectric parameter
thin film
