摘要
利用高速摄影技术，对磁控电弧离子镀中阴极斑点大小、寿命及运动轨迹进行了观测，获得了阴极斑点电流密度、运动速度随磁场、电弧电流及背景气体压力改变而变化的关系曲线。
The size,lifetime and motion track of the cathode spot which is connected to a magneticsteered vacuum dc arc on a consumable cathode as a source of material for film deposition,are studied using high speed photograph technique. For a titanium cathode,relationship of magnetic field,arc current and background pressure with cathode spot current density and velocity,are obtained. Results show that,for magnetic field inclusion,each factor has a markedly influence on spot behavior.
出处
《真空科学与技术》
CSCD
1995年第6期387-390,共4页
Vacuum Science and Technology
基金
国家教委留学回国人员基金
关键词
阴极斑点
高速摄影
磁控电弧
离子镀
Cathode spot,High-speed photograph,Magnetic-steered arc,Ion deposition
