摘要
采用溶胶凝胶法制备了复合钒钼酸H2V12-xMoxO31±y.nH2O(0≤x≤4.0)干凝胶薄膜湿敏元件,对其进行了复阻抗谱分析,结果表明:随着x的增加,对应的阻抗谱半圆的半径逐渐变大,x≥2.5时,电极表面接触部分在阻抗谱低频端开始体现,x=2.0时,阻抗值较大,且不受频率影响,元件性能较好;测试频率为1 kHz时,H2V8.5Mo3.5O32.nH2O干凝胶薄膜湿敏元件在全湿度范围内,其阻抗湿度曲线线性良好,灵敏度较高。
Poly-vanadium-molybdenum acid H2V12-xMoxO31±y·nH2O（0≤z≤4.0） xerogel thin fih,ls humidity elements are prepared by sol-gel process, and its complex impedance plots are analyzed. Results show that the radius of semicircle of the complex impedance plots for poly-vanadium-molybdenum acid xerogel thin films increase with increasing of x. When x ≥2.5, in the low-frequency range, the contact part of the total impedance for electrode appears. The properties of humidity elements are best as x = 2.0 ,while the complex impedance is higher and no relationship with frequency. H2V8.5Mo3.5O32·nH2O xerogel thin film humidity element has good linear and high sensitivity in total relative humidity range at 1 kHz.
出处
《传感器与微系统》
CSCD
北大核心
2006年第5期39-41,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(40304009)
关键词
复合钒钼酸干凝胶薄膜
湿敏元件
复阻抗
poly-vanadium-molybdenum xerogel thin film
humidity element
complex impedance
