摘要
在材料表面工程技术中应用高能束流是先进制造技术的一个重要发展方向,它具有常规加工方法无可比拟的特点。在新型薄膜材料的制备中,利用高能量密度的激光束、离子束等作为热源,辅助和诱导气相反应制备薄膜材料,克服了普通化学气相沉积和物理气相沉积超硬薄膜材料性能上的不足,显著地提高了薄膜的沉积效果。
High energy beam is one of the most important developing direction as an advanced manufacture technology in the modern material processing. Comparing with the other regular material processing methods, it has the uncompetitive characteristics. In the production of new type of thin film materials, it uses the laser as well as plasma of high energy and density to act as the heat source , assists and induces gas phase reaction to produce thin film materials. It overcomes the properties shortcomings of vapor deposition in ordinary CVD and PVD. Remarkably improving the deposition effects of thin films also.
出处
《电加工与模具》
2006年第B05期56-58,69,共4页
Electromachining & Mould
基金
江苏省教育厅自然科学研究指导性项目(04KJD430011)
关键词
高能束
气相沉积
薄膜
high energy beam
vapor deposition
thin films
