摘要
本文结合了某微电子厂房洁净室空调系统的实例,分析了洁净室的净化空调设计原理,并对气流组织方式、空气处理过程、排风排烟系统进行了阐述和讨论。
Based on a Microelectronic cleanroom HVAC system, describes the principles of cleanroom HVAC design and introduce air supply method, air treatment, exhaust and desmokes air supply method, air treatment, exhaust and desmokes system.
出处
《制冷技术》
2006年第1期32-34,38,共4页
Chinese Journal of Refrigeration Technology
