摘要
对基于印刷碳纳米管(CNT)薄膜的场发射器件的失效行为进行了研究。微观分析结果表明,器件失效主要是由真空击穿对CNT和导电衬底造成损坏所引起的。印刷CNT薄膜中存在的CNT团聚颗粒所造成的正反馈的发热和电流增加导致了真空击穿的发生。通过在真空室中对印刷CNT薄膜进行场发射条件下的老炼处理,有效地预防了真空击穿的发生,并使薄膜的场发射均匀性得到提高,证实了真空老炼对预防真空击穿和提高器件工作可靠性的作用。
The failure behavior of field emission devices based on printed carbon nanotube （CNT） films was investigated. Microscopic analysis results revealed that the failure behavior is mainly caused by the destruction of both carbon nanotubes and conductive substrate due to the vacuum breakdown, which resulted in the increased Joule heat and emission current due to the positive feedback field emission. By the ageing of the printed CNT films under field emission conditions in the Vacuum chamber, the vacuum breakdown was prevented effectively and the uniformity of field emission of the aged CNT film was improved. It indicates that ageing of the printed CNT films in the vacuum chamber is helpful for the prevention of vacuum breakdown and the improvement of reliability of devices during operating.
出处
《真空电子技术》
2006年第1期68-71,共4页
Vacuum Electronics
基金
国家自然科学基金重点项目(6003601060276037)
国家863重点项目(2001AA313090)
教育部博士点基金项目(20020698014)
关键词
丝网印刷
碳纳米管薄膜
场致发射
失效行为
老炼
可靠性
Screen-printing
Carbon nanotube films
Field emission
Failure behavior
Ageing
Reliability
