摘要
碳纳米管场发射显示器件(CNTFEDs)中阴极的制备和表面处理一直是其中的关键环节而备受关注,本文通过光刻技术、丝网印刷技术、表面超声等流程制作带有平整电阻层的发射阴极,并对该阴极进行场发射测试,并通过扫描电镜(SEM)照片分析阴极表面,发现开启电场、发射均匀性及电流稳定性比以前未加处理的阴极有很大程度上的改善。此法适合于大面积的碳纳米管场发射显示的阴极制作。
Fabrication and surface treatment of the cold cathode is a key process in making carbon nanotube field emission display（CNT-FEDs）, photolithography, printing technology and supersonic processing are used to fabricate a new type of cathode. In this cathode, a flat resistance layer is prepared. The surface morphology of the cold cathode is analysed by SEM,and the emission characteristic is also measured. As the results shown, the turn-on field, current stability and emission uniformity of this cathode is improved respectively to compare to the cathode without surface treatment. This type of cathode is very suit to large area CNT-FEDs.
出处
《电子器件》
EI
CAS
2006年第1期62-64,共3页
Chinese Journal of Electron Devices
基金
国家973计划基金资助(2003CB314706
2003CB314702)
教育部博士点基金资助(20030286003)
东南大学科技基金资助(XJ030611
XJ030612)。
关键词
碳纳米管
场发射
阴极
发射性能
carbon nanotube
field emission
cathode
emission character
