摘要
自动对准技术是集成电路后封装设备中的一项重要单元技术,是全自动划片机与普通划片机的最大区别之一。国际上主要划片机制造商的全自动设备都配有实时高效的图像识别对准单元。作为提高其设备性能的一种有力手段,长期以来在划片机的研制过程中我们已逐渐形成了适合划片机应用的视觉识别技术,取得了显著的阶段性成果。
The automatic alignment technique is a key part in the development of IC packaging equipment, which brings the dicing saw new bright spot contrast to the general saw. Fully- automatic dicing saws designed by many international dominant OEM are all equipped with efficient real-time vision alignment units. To improve the saw's performance, the vision technique fit for the dicing saw is studied these years, and some achievements are got, this paper makes simple analysis according to the design principle.
出处
《电子工业专用设备》
2006年第3期51-54,共4页
Equipment for Electronic Products Manufacturing
关键词
自动对准
模板匹配
视觉识别
兴趣区域
图像滤波
灰度值
几何边缘
机器视觉
Automatic alignment
Template match
Vision recognition
ROI
Image filter
Gradation level
Geometry edge
Machine vision