摘要
采用衍射图样—自相关测定技术测量缝宽尺寸是一个极为有效的测量方法,其测量范围为2～50μm。本文提出的新的图样处理方法,使自相关技术能应用于非接触,实时的在线微小尺寸的测量.
The method of measurement of micro-width by diffraction patterc-autocorrelation estimate technique is very effective. Its measurement range is from 2μm up to 50μm. The new method of pattern process suggested by this paper, can apply autocorrelation estimate technique to non-contacting, real time and online measurement of micro-width.
出处
《激光杂志》
CAS
1986年第1期19-23,共5页
Laser Journal
