摘要
本文给出了一种简单而准确地确定光学薄膜折射率和厚度的方法。利用分光光度计分别测量光学薄膜样品以及基底透射率曲线,采用柯西(Cauchy)色散模型以及非线性单纯形优化法对透射率测量曲线进行拟合,从而确定薄膜的光学常数和厚度。采用电子束热蒸发和电阻热蒸发方法,分别在CaF2基底上镀制ZnS薄膜和在Al2O3基底上镀制YbF3薄膜,通过测量其在400nm-2600nm波段内的透射率曲线,计算出ZnS和YbF3薄膜材料的折射率色散曲线以及膜层厚度。
A simple and accurate method for determining the refractive index and the thickness of thin films is presented in this paper. Transmission curves of optical film samples and substrates are measured by spectrophotometer. Cauchy dispersion model and the nonlinear simplex optimization method are used to fit the measured transmission curves, so as to determine thin film optical constants and thickness. By using the electron beambeating evaporation and resistive heating evaporation technique, the single-layer ZnS and YbF3 films are deposited on the CaF2and Al2O3 substrates, respectively. The refractive index dispersion curves in 400nm-2600nm and the thickness of ZnS and YbF3 thin film materials are calculated from the measured transmission curve.
出处
《激光杂志》
CAS
CSCD
北大核心
2006年第1期24-25,共2页
Laser Journal
关键词
光学薄膜
折射率
透射率
非线性单纯形法
分光光度法
optical films
refractive index
transmission,the nonlinear simplex method
spectrophotometric methods
