摘要
直拉法晶体形状控制采用Bardsley算法。先确定晶体重量、时间和长度初始值,再以给定初始时间确定晶体生长阶段,在相应时间段用线性内插法重新表示上述过程参变量,然后引入循环下标及前一控制周期模型量,得到相应长度增量的晶体模型重量。比较模型重量和称重传感器测量值,计算PID控制器输出,从而得出晶体重量。
The Bardsley algorithm was adopted in crystal-profile control for Czochralski crystal growth. Firstly, crystal weight, time and length initial value was confirmed, then the crystal growth stage was confirmed using the given time initial value. The parametric variable of above process was re-expressed by using linear interpolation method in the corresponding time period, and then, the recurrence subscript and the model value in the previous control cycle was inputted to gain the crystal model weight of the corresponding length increment in the end. The model weight is compared with the weight measured by the weight sensor, then the output of PID controller was calculated obtain the crystal weight.
出处
《兵工自动化》
2006年第1期58-59,共2页
Ordnance Industry Automation
