摘要
介绍了等离子体增强磁控溅射离子镀（ＰＥＭＳＩＰ）ＴｉＮ涂层的工艺、组织结构和性能．研究了氮分压和靶功率对涂层相组成和性能的影响，讨论了Ｔｉ２Ｎ对涂层硬度的影响．实验结果表明，由Ｔｉ２Ｎ和Ｔｉｎ两相组成的涂层硬度高，显著提高刀具耐用度．
This article deals with technologies, microstructures and properties of the coatings deposited by PEMSIP. The influence of N2 partial pressure and the target power on the component phases and the properties of the coatings is studied. The effect of Ti2N on the microhardness of the coatings is discussed. The results show that the,microhardness of the coatings consisting of Ti2N and TiN is harder than that of TiN only and that the coatings consisting of Ti2N and TiN make the tool life increase markedly.
出处
《大连理工大学学报》
CAS
CSCD
北大核心
1996年第1期41-46,共6页
Journal of Dalian University of Technology
基金
三束材料改性国家重点实验室资助
关键词
等离子体
离子镀
氮化钛
磁控溅射
涂层
plasma
ion plating
titanium nitride/magnetron sputtering
transition layer
