摘要
阐述了用于超高密度光存储的集成式扫描近场光学显微术(SNOM)微探尖的液相外延选择生长方案,并给出了实验结果.此种微探尖,可直接生长在微型集成式SNOM传感器的垂直腔表面发射激光器(VCSEL)晶片出光口上,避免了探尖转移带来的探尖损坏、难以对准等技术难题.该制作过程具有重复性较好,设备简单、经济,实用价值较高等优点.
A selective liquid phase epitaxy （LPE） method is used to grow the integrated near-field scanning optical microscopy （SNOM）microtips that are applied in the ultra-high-density optical recording. The microtips can be directly grown on the light-emitting windows of vertical-cavity surface-emitting laser （VCSEL）. This avoids the damage and alignment problems that will occur during transferring the microtips by other methods. Using this method, the growth of the microtips is simple, high reproducible and commercial.
出处
《集美大学学报（自然科学版）》
CAS
2005年第4期356-359,共4页
Journal of Jimei University：Natural Science
