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激波压力扰动辅助电火花加工高深宽比微细结构方法研究 被引量:2

Shock Wave Aided EDM of the High Aspect Ratio Micro-Structures
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摘要 针对电火花加工高深宽比微细结构时放电间隙小、加工产物不易排除的技术难题,在分析电火花加工电蚀产物稳定性的理论基础上,结合脉冲超声聚焦技术,提出了激波压力扰动辅助电火花加工高深宽比微细结构的方法,设计了激励电源和激波发生器试验装置,测试了相应的电功率和声功率。初步实验表明,该方法可促进电蚀产物的排除,改善加工稳定性,提高加工精度,为进一步研究提供了重要的理论和实验依据。 A key problem was analyzed in the electrical discharge machining (EDM) of the high aspect ratio micro-structures. The mechanism of shock wave was studied. Based on this, a method of shock wave aided EDM was presented. A shock wave generator system and the pulse generator were designed. The electrical power and the uhrasonic power were measured, h was demonstrated that the method can promote the electrical erosion to exclude and improve the processing stability. All of the research will provide the theoretic and experimental foundation for the further research.
作者 蒋凯 汪炜
出处 《电加工与模具》 2005年第6期30-33,共4页 Electromachining & Mould
关键词 激波 电火花加工 高深宽比 超声聚焦 激励电源 shock wave EDM high aspect ratio focus of ultrasonic pulse generator
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