摘要
作为制取炭薄膜原料之一的两种耐高温聚酰亚胺薄膜在高纯氮气流条件下形成炭膜过程中对其元素组成变化进行了研究。结果表明，两种样品中均含有碳、氢、氮和氧等四种成分。在５００℃以前各种元素含量变化不大。在此温度之后，碳元素含量随炭化温度的升高而增加。而且，在６００～７００℃温度之间增加最快。但是，氧元素的含量在７５０℃以前下降最多；氢元素的含量却一直在下降；氮元素的含量在６００℃以后开始明显地减少。同时，Ｏ／Ｃ、Ｈ／Ｃ和Ｎ／Ｃ比例随炭化热解温度的增加而减小反映了递进的炭化作用。另外，还讨论了两种样品从室温到高温各元素组成变化的差异。
Abstract:Two kinds for the preparation high-temperature polyimide thin films as one of made carbon film precursor during is formed carbon film the variation of elemental composition at pure nitrogen have been studies.The experimental results were showed that carbon,nitrogen,oxygen and hydrogen are four basic elements in two samples. Before 500℃ the content of variant elements have had a little variation. At temperature biger than 500℃ the content of carbon element is increased with rising temperature, and which is increased rapidly at 600-700℃.Whereas before 750℃ the content of oxygen element is dropped at most. The content of hydrogen element with rising temperature is dropped all the time.After 600℃ the content of nitrogen element start decreasing marklly. Simultaneously,the decreasing of ratio O/C, H/C and N/C with rising pyrolysis temperature reflected the gradually progressive carbonization. In addition the difference of elemental composition from room temperature to high temperature fro two types samples were also discussed.
出处
《炭素》
1996年第2期25-29,共5页
Carbon
基金
国家自然科学基金
