摘要
论述了温度对压力传感器输出灵敏度的影响,为了减小传感器输出的温度漂移,利用双惠斯登电桥方法进行补偿,在300～373 K的温度范围内对传感器进行了测试.结果表明,采用双桥法补偿后,传感器输出的温度漂移可以降低70%以上.
The effect of temperature on the output sensitivity of the piezo-resistive pressure sensor was discussed. In order to reduce the temperature drift of output for the piezo-resistive pressure sensor, the double Wheatstonebridge method is used to test the sensor with the temperature controlled at the range of 300-373 K. The results indicate that the temperature drift of the sensor output can be lowered by over 70%.
出处
《物理测试》
CAS
2005年第6期60-62,共3页
Physics Examination and Testing
关键词
压力传感器
双桥法
温度漂移
补偿
灵敏度
pressure sensor
double-bridge method
temperature drift
compensation
sensitivity
