摘要
Thin film microbattery is a promising micropower source for its high energy density and good cell performances, and the application of fast lithium ion conducting solids as electrolytes is thus very important. （Li 0.5 La 0.5 ）TiO3 （LLTO） thin film electrolytes for thin film microbattery were prepared onto Pt/Si substrates using magnetron sputtering. As-deposited LLTO thin films showed amorphous-like phases and when deposition temperature increases the ionic conductivity raises accordingly. The ionic conductivity of LLTO thin film reaches 8.7×10 -6 S/cm when the deposition temperature is 400℃, which shows that the LLTO thin films deposited by magnetron sputtering are suitable for application as an electrolyte for thin film microbattery.
Thin film microbattery is a promising micropower source for its high energy density and good cell performances, and the application of fast lithium ion conducting solids as electrolytes is thus very important. （Li0.5 La0.5 ） TiO3 （LLTO） thin film electrolytes for thin film microbattery were prepared onto Pt/Si substrates using magnetron sputtering. As-deposited LLTO thin films showed amorphous-like phases 8nd when deposition temperature increases the ionic conductivity raises accordingly. The ionic conductivity of I.I.TO thin film reaches 8.7 × 10^-6 S/cm when the deposition temperature is 400℃. which shows that the LLTO thin films deposited by magnetron sputtering are suitable for application as an electrolyte for thin film microbattery.
出处
《广东有色金属学报》
2005年第2期439-443,共5页
Journal of Guangdong Non-Ferrous Metals
基金
InnovationFund(No.82236)ofGeneralResearchInstituteforNonferrousMetals(GRINM)
关键词
薄膜
电极
固相
电池
离子传导性
（Li0.5 La0.5 ） TiO3
solid state electrolyte
magnetron sputtering
thin film microbattery
ionic conductivity
