摘要
采用高分子聚合物单体混合溶液按需滴定原位热聚合的新方法制作折射微透镜及其阵列.制备透镜的主要材料是甲基丙烯酸甲酯及其聚合物.制备的微透镜直径在1mm～3mm范围内,矢高为100μm～400μm,透镜焦距在1mm～4mm之间.所得微透镜在波长λ=1.55μm处有很好的光学透过率(90%),适于作光通信耦合器件.用AFMⅡ型原子力显微镜测得微透镜阵列的表面粗糙度Ra约等于0.9nm,并通过液体的表面张力理论分析了微透镜的形成机理.
High-quality refractive microlens and microlens array have been fabricated using drop-on-demand and in-situ thermal polymerization technology with polymer PMMA and its monomer MMA. Microlenses diameters and heights range from d=1 mm to 3 mm, and h=100μm to 400μm, respectively. A focal length ranges from 1mm to 4 mm approximately. All the components have high optical transparency（90%）at the wavelength of 1.55μm to be suitable for optical communication coupled devices. The surface roughness of microlens is measured by an atomic force microscope （AFM-Ⅱ）. Micro-lens forming mechanics has been analyzed by surface tension theory.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第11期1639-1642,共4页
Acta Photonica Sinica
基金
国家自然科学重点基金(60337030)资助项目
