摘要
对比模拟退火算法介绍了非常快速模拟退火算法的流程,并使用非常模拟退火算法计算了椭偏数据。计算结果证明非常模拟退火算法的计算精度有所提高。然后分析了算法的退火计划和模型扰动,提出了算法的改进策略。
According to comparing with simulation annealing algorithm the paper introduce very fast simulation annealing algorithm and use VFSA to compute the ellipsometry data. The result of calculation prove that the method have been improvement on the precision of calculation of the ellipsometry data some extent, then the paper analyses the annealing scheme of the algorithm and model perturbation, at last proposing the improvement tactics of the algorithm.
出处
《现代机械》
2005年第5期26-28,共3页
Modern Machinery
