摘要
该文着重分析金属线厚度对Q值的影响.为此设计了三组电感,它们的金属线厚度分别为51、0和20μm,并用Ansoft HFSS软件进行FEM(finite element method)的仿真.仿真的结果表明,金属线厚度对电感Q值的影响在很大程度上取决于电感内径的大小.因此当金属线厚度超过10μm时,通过进一步增加金属线厚度来改善Q值仍是可能的.
The effect of metal thickness on the quality factor of planar spiral induetors is simulated and analyzed. Three types of induetors with metal thickness of 5 - 20 μm were designed and simulated by FEM using Ansoft HFSS. It is shown that the metal thickness effect on the Q-factor depends on the diameter of the innermost turn in a planar spiral inductor. Therefore it is possible to further improve Q-factors by increasing the metal thickness bevond 10 μm.
出处
《上海大学学报（自然科学版）》
CAS
CSCD
北大核心
2005年第5期455-459,共5页
Journal of Shanghai University:Natural Science Edition
