摘要
对于薄层厚度的测量，在工程及科学研究中均有十分广泛的应用。本文针对精确测量薄层厚度的要求。提出了一种新的同态信号处理方法。这种方法的基本原理是对被测信号的能量谱的对数导数进行傅里叶反变换，得出其在时域的包络，从包络中得出其所需的时间延迟信息，从而得到薄层的厚度。与其他测量厚度的信号处理技术相比，其精度和测量的厚度极限及抗干扰性能均有很大提高，显示了很好的发展前景。
The layer thickness measurement has widely used in engineering and sceince research.This paper gives out a new method of homomorphic signal processing according to the accuracy requirement of layer thickness measurement. The basic therorem of this methood is to have inverse Fourier Transform to energy specturm's logart=ithmic derivative of the measured signal, and get its envelope in time domains. From the envelope,we can pick up the needed time delay information. so that the layer thickness can be obtained. Comparing with other signal processing method or measuring thickness, the acccuracy, the measuring thickness limit and the resisting interference characterics of the method are largely improved.It shows a good prospect.
出处
《信号处理》
CSCD
北大核心
1995年第1期57-61,共5页
Journal of Signal Processing
关键词
薄层厚度
同态处理
能量谱
测量
信号处理
Layer Thickness,Homomorphic Processing, Energy Spectrum,Measurement
