摘要
半导体氢敏传感器是一种新型气敏元件。它是以金属钯作为栅极，由Ｐｄ─Ｓｉｏ＿２─Ｓｉ构成的钯栅场效应管。本文研究了它的结构及性能，它可用于氢气的探漏与检测，也可间接地实现对其他气体如变压器油、煤气等含氢气体的检测与预报。
Semiconductor Hydrogen Sensor is a new type of gas-sensitive element.It has grid of metal Palladium and palladium field effect tube composed of Pd-Sio_2-Si.This article focuses on the structure and utilization of the sensor. It can be used in leak-hunting and testing of hydrogen, As for other hydrogen-existing gas such as transformer oil and coal gas,it can also be used for testing and forecasting in an indirect way.
出处
《山东矿业学院学报》
CAS
1995年第4期405-408,共4页
Journal of Shandong University of Science and Technology(Natural Science)
