摘要
研制出用于现代光通信密集波分复用(DWDM)系统的微型谐振环波分复用器(MRRWM)。微环与信道波导采用垂直耦合的方式,利用耦合模理论对器件参数进行了优化设计,设计出模板,并研制出符合器件光学性能要求的聚合物材料。利用反应离子刻蚀技术完成了硅基板上单级和八级的器件制作,波分复用器的中心波长为1.55μm,输出波长间隔Δλ=1.6 nm,中心微环半径R=131.95μm,相邻微环半径差ΔR=500.0 nm,器件测试结果表明实现了微环谐振输出。
Microring resonator is a original integrated optics device, which has developed for several years. Being a basic elements, microring resonator coulpled to a waveguide vertically offers high-quality factors, in large scale photoelectric integrated circuits, it can be used as filters, multiplexers, modulators, lasers and etc. This component has promising application in wavelength-division multiplexing（WDM） system because of their simple structure, easier fabrication and compactness. Most of the microring resonator devices have been fabricated using semiconductor material. In this work, we use polymer to fabricate microring device, polymer has a number of advantages over semiconductor-based devices, the first one is to deduce loss, the use of low refractive index polymers will significantly reduce scattering loss, the second advantage is to provide better coupling efficiency to optical fibers than previously demonstrated semiconductor waveguides due to the low index and the large cross section of the polymer waveguide. Polymer materials also have other properties such like the excellent photoelectric characteristics, lower cost and simpler fabrication. The structure and working principle of microring resonant wavelength multiplexers （MRRWM） and device design are discussed. In microring resonators, the coupling coefficient plays an important role in determining the device characteristics. The coupling coefficient depends exponentially on the gap distance between the ring and the straight waveguide. We analyzed the transmission characteristics, designed a 8 channels microring resonant wavelength multiplexer（MRRWM） , the central wavelength of MRRWM is 1.55 μm, the wavelength spacing is 1.6 nm. To fabricate polymer waveguide in microring devices, the reactive ion etching （RIE） technique was used. The single channel and 8 channel polymer MRRWM with polymers based on silicon are fabricated. In the optical measurement, we used a tunable semiconductor laser with a tuning range from 1 530 nm to 1 61
出处
《发光学报》
EI
CAS
CSCD
北大核心
2005年第4期538-541,共4页
Chinese Journal of Luminescence
基金
中国科学院"百人计划"
中国科学院长春光机与物理所现代光学创新基金资助项目
