摘要
在半导体元件的制造中,腐蚀蒸汽及磨损粒子会污染油封泵的润滑剂,并降低其使 用寿命。为了解决这个问题,开发了干式真空泵。本文重点介绍了干式泵中很有前途的 爪型泵,并给出了计算型线的方程式。
During producing semiconductor components, aggressive vapours and / or abrasive particles may contaminate the lubricant of oil lubricated rotary pump, which shortens its service life. To overcome these problems,one kind of dry pumps has been developed.This paper especially introduces the claw type pump with wide future among dry pumps,and has the equation about the calculation of profile.
出处
《真空》
CAS
北大核心
1989年第3期9-13.5,53,共6页
Vacuum