摘要
研究了压电陶瓷驱动器特有的迟滞和儒变特性,针对它的这些非线性特点,给出了一种有效消除这些非线性误差的闭环控制方案。采用高精度A/D和D/A转换芯片,设计了基于PC机并行增强口EPP协议的控制板。在自行设计高压驱动电路的基础上,研制出了用于纳米级定位的数字闭环控制器。测试结果表明,此控制器很好地克服压电陶瓷驱动器的非线性特性,系统定位精度优于10 nm。
The properties of the hysteresis and creep of piezoelectric actuator is studied. As to the non-linearity characteristics, a close-loop control method is proposed for eliminating this piezoelectric error. The high precision A/D and D/A chip are adopted, and the control card based on the EPP protocol of PC is designed. Based on the design of the high voltage drive power a close-loop control system is designed for nanopositioning system. The tested result shows that this controller can depress the non-linearity of piezoelectric actuator availably. The positioning accuracy of this system is better than 10 nm.
出处
《压电与声光》
CAS
CSCD
北大核心
2005年第4期372-374,388,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金项目非探针扫描近场光学显微成像方法基金资助项目(30170276)
光洁亚表面纳米结构探测基金资助项目(10176010)
关键词
压电陶瓷
微位移
迟滞
蠕变
EPP
piezoelectric-actuator
micro-position
hysteresis
creep
EPP
