摘要
本文报告了我们首先提出的采用ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结作为大屏幕投影液晶光阀光敏层，向列型液晶作为液晶光阀调制层的一种新型液晶光阀．Ａ－Ｓｉ：Ｈ光导层和ｎｃ－Ｓｉ：Ｈ阻光层通过辉光放电等离子体化学气相沉积法连续制得．本文研究了不同沉积条件下ｎｃ－Ｓｉ：Ｈ薄膜的结构和光电性质．Ａ－Ｓｉ：Ｈ和随之沉积的ｎｃ－Ｓｉ：Ｈ形成了ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结，本文还讨论了它的光电性质。采用ａ－Ｓｉ：Ｈ／ｎｃ－Ｓｉ：Ｈ异质结的液晶光阀可改进器件的许多性能．
Liquid crystal jight valve (LCLV ) using a-Si: H/nc-Si: H helerojunclion as the photosensor andnematic liquid crystal as the modulator has been firstly presented for large screen projunctiondisplay. Nc-Si: H light blacking layer has been inserted for increasing the device gain. The a-Si:Hphotoconductor and nc-Si: H light blocking layer were prepared by a modifyied glow discharge CVDmethod. The optoelectronic and structure properties of a-Si: H/nc-Si: H heterojunction with yaringparameters have been studied. LCLV using a-Si: H/nc-Si: H heterojunction as photosensor has shownthst inserting of nc-Si: H light blocking layer can improve most aspects of device performance.
关键词
纳米硅薄膜
异质结
液晶光阀
薄膜
阻光层
nanocrystalline silicon
heterojunction
liquid crystal light valve
