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纳米膜复合技术进展

Progress of Nanometer Film Compound Technologies
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摘要 本文综述了纳米膜的形成机理和纳米膜的复合制备技术。根据纳米膜在复合制备过程中所处的相态不同,对纳米膜的复合技术进行了简单的分类,并重点论述了纳米膜的物理气相复合技术、化学气相复合技术和液相复合制备技术的研究和应用情况。 Because of the important roles of nanometer composite film in improving the surface properties of materials in many fields, the forming mechanisms of nanometer composite film and its compounding technologies were summarized in this article. Based on the different states of materials during the preparation of nanometer film, the compounding technologies of nanometer film were classified simply. And the researching status of physical vapor compound technologies, chemical vapor compound technologies and liquid compound technologies in preparing nanometer film were discussed emphatically.
出处 《化工文摘》 2005年第4期47-50,共4页
关键词 纳米膜 技术进展 复合技术 制备技术 形成机理 制备过程 应用情况 化学气相 液相 nanometer film compound technology vapor deposition liquid deposition
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