摘要
建立了薄膜气敏元件响应与膜厚的关系。指出随着膜厚减小，元件响应呈上升、下降、再上升的规律，且较好地解释了实验发现的响应与膜厚的关系对还原性气体种类的依赖。
or thin film gas sensors,the relation between response and thickness has been established. It is pointed out that when the thickness of thin film decreases,the response of gas sensor will increase at first, decrease secondly and then increase again. The dependence of the relation between response and thickness,which was observed in experiments on the different reducing gases is well explained.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1994年第2期172-176,共5页
Research & Progress of SSE
关键词
簿膜
气敏元件
响应
膜厚
Thin Film,Gas Sensors,Response,Thickness
