摘要
对当前硅光集成的研究焦点－制备大断面单模脊形光波导的单模条件，用有效折射率法进行分析，也计算了传播常数等性能参数。结果表明，有效折射率法有方法简明、结论确切的优点。它能同时给出单模区、多模区及截止区的条件，已有效指导了ＳＩＭＯＸ及ｎ／ｎ＋外延型两种单模脊形硅光波导的制备。文中最后给出了实验结果。
The single-mode conditions and propagating constants of Si rib optical waveguides with large cross-section in SIMOX and n/n+ structures have been analysed by the method of effective refraction index. Results show that the method possesses the advantages of simplicity and exactness. In addition to the single-modecondition,it gives the cut-off and multi-mode conditions as well. The results are instructive in fabricating the waveguides. Comparison between the simulating resultsand practical waveguides has also been shown in the paper.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
1994年第1期91-95,共5页
Research & Progress of SSE
基金
天津市自然科学基金
关键词
硅光波导
硅光集成
光波导
传播
Silicon Optical Waveguides,Silicon Optical Integration
