摘要
在光学薄膜镀制中,比较片与样品片之间的厚度比例关系是间接监控法成功的重要参数计算表明,三半波带通滤光片中心位置能大致推测出这一关系,通带形状能粗略反映镀制过程中的变化以及不同膜料间的比例系数差别 后期,作者顺利制作出多个不同中心位置的带通滤光片.
Tooling factor is one of the most important parameters in optical thin film coating process. Calculation indicates that, while coating three half-wave filter, it is possible to roughly get this factor from the passband center position, factor variation and factor difference of different materials from the shape of measurement curve. With this method, we have produced several kinds of bandpass fileters.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2005年第5期710-712,共3页
Acta Photonica Sinica
关键词
薄膜光学
三半波滤光片
比例系数
膜厚分析
Film optics
Three half-wave filter
Tooling factor
Thickness analyzing
