摘要
将面向资源的着色、赋时Petri网(coloredtimedresource orientedPetrinet,CTROPN)用于半导体制造业中自动组合装置的建模.CTROPN具有较强的建模能力,能够准确描述自动组合装置的加工过程.借助该模型,对非重入加工过程的初始特性、稳态特性和结束特性进行详细的分析.
A colored timed resource-oriented Petri net (CTROPN) is powerful tool to simulate the systems' resource distribution. It is developed to model the cluster tools in semiconductor manufacturing. Since each module in a cluster tool corresponds an unique place p in CTROPN, it is structurally simple and concise. Through modeling the qualitative and temporal behavior of the cluster tools with non-revisiting. The initial transient behavior, steady-state behavior and the final transient behavior can all be investigated through a single model.
出处
《系统工程理论与实践》
EI
CSCD
北大核心
2005年第6期11-18,共8页
Systems Engineering-Theory & Practice
基金
广东省自然科学基金团队项目(20003051)
