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立方Mg_xZn_(1-x)O晶体薄膜的制备和性能 被引量:3

Growth of cubic Mg_xZn_(1-x)O films and characterization
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摘要 采用低温物理沉积技术在二氧化硅衬底(SiO2/Si(100))和石英玻璃上生长出了MgxZn1-xO(x>0.5)晶体薄膜,并用扫描电镜(SEM)、原子力显微镜(AFM)、X射线衍射(XRD)图谱和紫外-可见光透射光谱对其进行了表征.结果表明,在SiO2/Si(100)和石英玻璃衬底上沉积的MgxZn1-xO(x>0.5)晶体薄膜表面平整,均呈立方结构,且具有高度的(001)择优取向.立方MgxZn1-xO薄膜具有从紫外到近红外波段良好的透明性,折射率为1.7-1.8,随着波长的增大或Mg组分的增大而降低. Highly (001) oriented cubic MgxZn1-xO (x >0.5) thin films were deposited on amorphous silicon dioxide substrates (SiO2/Si(100) and quartz) by low temperature epitaxy at 250℃. SEM and AFM characterizations showed that the surfaces of cubic MgxZn1-xO (x >0.5) thin films are very smooth. XRD and UV-Vis light transmission spectra of the thin films demonstrated that crystalline films grown on SiO2/Si(100) and quartz substrates present cubic structure, and highly (001) orientation dominates the diffraction curves. Interference modulation of the transmission spectra indicated that the surface of cubic MgxZn1-xO films is uniform, and transmission spectra represent that transparency of thin films is very high from ultraviolet to visible light wave band. The refractive indices of the thin films are between 1.7 and 1.8, decreasing with the increase of either the content of Mg or wavelength.
出处 《材料研究学报》 EI CAS CSCD 北大核心 2005年第3期277-281,共5页 Chinese Journal of Materials Research
基金 国家自然科学基金10174064上海应用材料研究与发展基金0214资助项目.
关键词 无机非金属材料 MgxZn1-xO晶体薄膜 低温物理沉积 立方相MgxZn1-xO 折射率 inorganic non-metallic materials, MgxZn1-xO thin films, low temperature physical deposition, cubic MgXZn1-X O film, refractive index
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