摘要
本文进行了对模具表面离子镀TiN薄膜的研究,本实验采用直流二极型离子镀,实验设备是由一台真空镀膜机改装而成。离子镀是一个很复杂的过程,这是由于此过程中的参数很多,例如,基体与蒸发源间的距离、活化反应过程中的氮分压与氩分压、基偏压、蒸发电流、基体温度等。在我们的实验条件下,模具的表面得到了理想的镀层,TiN镀层呈金黄色,其平均厚度为2.5—3.0μm、显微硬度达2000—2200kg/mm^2,附着力为1.5—2.0kg/mm^2。这种经离子镀处理过的模具,其使用寿命可以延长3—4倍。
Type Ⅱ electrode dc ion plating was adopted in this experiment. A vacumm coating machine was refitted as the experimental equipment. Ion Plating is a complicated process because there are a lot of parameters in this process, for example, distance between the substrate and the evaporation source, nitrogen partial pressure, argon pantial pressure, bias valtage, evaporation current and substrate temperature, etc. The perfect TiN coating on dies surface was obtained under our experimental condition. The TiN coating showed golden color, its mean thickness was 2.5-3.0μm, its micro hardness was 2000-2200kg/mm^2, and its adhesive strength 1.5-2.0kg/mm^2. The dies treated by ion plating could prolong their service life by 3-4 times.
关键词
模具
离子镀
TIN薄膜
ion plating
dies
activated gas
activated rcction
coating
substrate
