摘要
通过对一般溅射镀膜装置特点以及镀膜过程中存在问题的分析，指出：由于溅射镀膜时的工作压力处于扩散泵的恒定排气量区（第一级喷口过载区）．扩故泵在这种环境下工作，返流严重，并且由于喷流不稳定现象导致压力难于控制。提出了一种由扩散泵机组作为溅射镀膜油气系统的改进型设计方案。理论分析表明：使用该方案，扩散泵进气口压力维持在恒定抽速区．返流减小，镀膜室工作压力也易于稳定。
With the analysis on the performance of the common sputter ing coating system and the problems in the coating procedure,We obtained that:during sputtering coating,because the working pressure is at the constant dischargement area(jet overload area on first stage)of diffusion pump.when diffusion pump works in the enviroment,the backflow is very serious,and instability of jet cause the pressure uncontrolled.We raise an improved design project which used the diffusion pump series as the sputter coating pumping system,The theory anlysis shows if this project is adopted and the pressure of the inlet of the diffusion pump is maintained in the constant pumping speed area,the backflow will decrease and the working pressure of the coating room will be easily stabilized.
出处
《真空与低温》
1994年第2期70-73,共4页
Vacuum and Cryogenics
