摘要
本文介绍了用Ｓ５－１１５Ｕ可编程控制器实现建筑玻璃镀膜生产的自动控制，实现对磁控溅射靶电源自动控制，系统组成，程序编制及在应用中注意的问题。该系统稳定，可靠。功能强，维修方便。同时，解决了靶极异常放电对镀膜质量的影响，从而实现了建筑玻璃真空镀膜生产过程的自动化。
Abstract In this paper it is introduced that the automatic controlling of theproducing process in architectural glass coating system. It consists of thecontrolling of the power source of magnetic sputtering cathode, the constitution of the system, programming and several problems to be noticed. Thissystem has the advantages of great stable and reliable ability, integrity offunction and convenient repair.In the meanwhile,iL also solves the a1Jnormal arcing of the cathode whichseriously affects the quality of the film. Therefore, it realizes the automaticcontrolling of this system.
出处
《真空》
CAS
北大核心
1994年第3期9-14,共6页
Vacuum
